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Northwestern University
NUFAB
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New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Advisory Committee
Photolithography
Home
Equipment
Photolithography
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Osiris UNIXX S 20 D
Convection Ovens – Blue M DCC-146-C-ST350
Develop Hood
Mask Aligner – Suss MABA6
Mask Aligner – Suss MJB4
Maskless Aligner – Heidelberg MLA150
Maskless Aligner – Heidelberg uPG501
Microscope – Nikon LV150
Polyimide/SU8 Hood
Spinner Hood
Ultraviolet Flood Exposure System – Inpro Technologies F300S
Vacuum Oven
Photolithography Hood (Cook)
Mask Aligner – Q4000 (Cook)
Mask Aligner – MABA6 (Cook)
New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Team Overview
Nasir Basit, PhD
Serkan Butun, PhD
Anil Dhote, PhD
Ying Jia, PhD
Shaoning Lu, PhD
Diego Santiago De La Vega
Advisory Committee
