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Northwestern University
NUFAB
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New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Advisory Committee
Cook Cleanroom Instruments
Home
Equipment
Cook Cleanroom Instruments
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
AmScope ME600T
Sputter III - AJA - Niobium
Quantum Deposition System - Plassys
Automatic Wire Bonder - TPT HB100
F20 Thin-Film Analyzer
Wafer Dicing System – ADT 7122
Wire Bonder-Wedge – West Bond
RTP – AS-Micro
Hall Effect / Resistivity / I-V Measurements System – HMS 8404
RIE 10NR – Samco
ALD – Savannah S100
E-Beam Evaporator – Auto 306
E-Beam Evaporator – Auto 500
Photolithography Hood
Mask Aligner – Q4000
Mask Aligner – MABA6
New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Team Overview
Nasir Basit, PhD
Serkan Butun, PhD
Anil Dhote, PhD
Ying Jia, PhD
Shaoning Lu, PhD
Diego Santiago De La Vega
Advisory Committee
