Northwestern University

Dry Etching - Ashing Instruments

Deep Reactive Ion Etcher (DRIE) – STS LpX Pegasus photo

Deep Reactive Ion Etcher (DRIE) – STS LpX Pegasus

Deep Reactive Ion Etcher (DRIE) – Samco 400iPB photo

Deep Reactive Ion Etcher (DRIE) – Samco 400iPB

Deep Reactive Ion Etcher (DRIE) – Samco 400iPB photo

Plasma Cleaner – Samco PC-300

Reactive Ion Etcher (RIE) – Samco RIE-10NR photo

Reactive Ion Etcher (RIE) – Samco RIE-10NR

Xenon Difluoride Etcher – Xactix photo

Xenon Difluoride Etcher – Xactix

Samco - RIE 10NR photo

Samco - RIE 10NR