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Northwestern University
NUFAB
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New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Advisory Committee
Characterization Instruments
Home
Equipment
Characterization Instruments
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
JEOL JIB-4700F
3D Optical Profiler – Zygo nexview
Atomic Force Microscope – Bruker Edge
Contact Angle Measurement – VCA Optima XE
Electrical Test Station
Nikon LV150
Reflectometer – Filmetrics F20
Spectroscopic Ellipsometer – J.A. Woollam alpha-SE
Stylus Profilometer – Veeco Dektak-8
Thin Film Stress Measurement System – FLX 2320-S
Optical Tensiometer, Biolin Attension Theta Flow
F20 Thin-Film Analyzer (Cook)
Hall Effect / Resistivity / I-V Measurements System – HMS 8404 (Cook)
New Users
New Users Overview
Policy and Rates
Publication Acknowledgements
Equipment
Equipment Overview
Characterization Instruments
Cook Cleanroom Instruments
Deposition Instruments
Dry Etching - Ashing Instruments
E-Beam Lithography Instruments
Furnace Instruments
Packaging
Photolithography
Rapid Prototyping Instruments
Wet Processing Instruments
Outreach
News and Events
About
About Overview
Team
Team Overview
Nasir Basit, PhD
Serkan Butun, PhD
Anil Dhote, PhD
Ying Jia, PhD
Shaoning Lu, PhD
Diego Santiago De La Vega
Advisory Committee