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3D Optical Profiler – Zygo

Instrument Details

Features

  • Z precision: less than 1nm
  • Objective lens: 5X, 10X, 50X
  • Zoom lens: 1X, 1.5X, 2X
  • Auto Light, Auto Focus, Focus Aid and Auto Tilt available
  • Multi-scan length from 5 um to 145 um
  • Extended scan length available
  • Advanced analysis tool
  • Remote control of objective lens switching
  • Joy stick control of stage: X, Y, Pitch and Roll

3D Optical Profiler – Zygo instrument photo

NUcore RESERVATION

Facility Contact

Main Contact: Ying Jia, PhD
Office: Tech, #FG71
(847) 467-2142 / email

Alternate Contact: Serkan Butun, PhD
(847) 467-5959/email

Location

Technological Institute FG70