About NUFAB

NUFAB’s mission is to help advance Northwestern University’s (NU) research and expand it into new emerging fields. NUFAB operates a well-resourced, 24/7 shared cleanroom facility that actively acquires, maintains, upgrades, and customizes a cutting-edge fabrication toolset to encourage innovation. NUFAB’s highly qualified and dedicated staff work closely with students and researchers from around the world to develop new fabrication techniques and processes while inspiring, educating, and training the global workforce needed for tomorrow’s high-tech industries.

In 2005, then Vice-President for Research, Brad Moore, appointed a committee to examine the needs and opportunities for research requiring cleanroom capabilities. This committee recommended building a new mid-size cleanroom with capabilities for fabricating silicon-based microelectronics for research in microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), and soft/bio compatible MEMS/NEMS. In 2008, Dr. Nasir Basit was appointed NUFAB’s founding director and tasked with implementing this vision.

Under Dr. Basit’s leadership, NUFAB began operations on March 1, 2010, in a renovated 900 ft² cleanroom while plans were developed for a new, state-of-the-art facility. On August 1, 2013, NUFAB completed a carefully planned, phased move into its new building, limiting equipment downtime to only a few weeks. The new facility provided 6,000 ft² of cleanroom space, with an additional 1,000 ft² reserved for future expansion.

In fall 2015, Northwestern convened a Microfabrication Task Force to evaluate current and future cleanroom needs in anticipation of Professor John Rogers joining the University in fall 2016. His research program was expected to generate significant growth in cleanroom utilization. To prepare for this expansion, NUFAB increased its technical staff and worked with the Office for Research and Facilities Management to build out the 1,000 ft² expansion area. Construction began in December 2017 and was completed on October 31, 2018.

Also in 2015, NUFAB joined the National Science Foundation’s National Nanotechnology Coordinated Infrastructure (NNCI) network as part of the Northwestern University–University of Chicago node. One of 16 nodes nationwide at the time, this partnership significantly expanded NUFAB’s outreach and access to external academic and industrial researchers.

In late 2020, a cleanroom task force recommended integrating the Materials Processing and Microfabrication Facility (MPMF), a 2,000 ft² cleanroom, into NUFAB operations. This initiative included refurbishing and rebranding the space to support new research programs and emerging technologies. As part of Northwestern’s quantum initiative, NUFAB has continued to expand its specialized capabilities. Through 2026, new equipment has included an ultra-high-vacuum (UHV) niobium sputtering system; a UHV, multichamber, variable-angle Josephson junction deposition system for superconducting materials; an automated wire bonder capable of bonding aluminum, niobium, and tantalum; an ULVAC deep-oxide etching system for lithium niobate and silicon dioxide; and an ion milling system with 150 mm wafer capability.

In 2023, Northwestern was selected to co-lead the Chan Zuckerberg Biohub Chicago, with NUFAB providing its researchers with access to a state-of-the-art fabrication facility and associated technical expertise. Together with the many other initiatives undertaken over the years, these investments have substantially expanded NUFAB’s capabilities, research impact, and user community. By 2026, NUFAB’s research output and breadth of capabilities had grown to place it among the largest university nanofabrication facilities in the United States. Further expansion of  cleanroom space is now under consideration to meet continued growth in research.