JEOL JIB-4700F
Instrument Details
Features
The JEOL JIB-4700F is a high-resolution SEM with EDS and FIB
- Sample size: Pieces to 4” wafers
3 Detectors
- Secondary Electron Detection -- Lower, Upper, and FIB imaging.
- Backscattered Electron Detection -- Composite and Topographical imaging
- Energy Dispersive Spectroscopy
- Combination of detector signals is possible.
Electron Optical Specifications
- ZrO/W Cathode.
- Resolution: 1.2 nm at 15.0 kV
- Accelerating Voltage: 0.5 to 30 kV.
- Beam Current: 1 pA to 300 nA.
- Specimen Bias Voltage: to 2.0 kV.
Ion Optical System Specifications
- Gallium Liquid Metal Ion Source
- Resolution at
- Beam Current: 1 pA to 90 nA.
- Milling and Deposition possible.
- Carbon, Platinum, and Tungsten gas injection deposition
