Mask Aligner – MABA6

Instrument Details

Features

• Front and backside optical alignment
• 6″ system with 4″, 3″, and 2″ chucks, and 5″x5″, 4″x4″, and 3″x3″ masks holders available

NUcore RESERVATION

Facility Contact

Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email

Location