Instrument Details
Features
- Materials: Ti, Cr, Ag, Au, Pt, Ni, Al, Cu, Oxides (SiO2, Al2O3) etc.
- Automatic PLC operated vacuum control system with touch screen
- Single and multilayer deposition
- In-line safety interlocks
- Four pocket e-beam source (4cc pockets)
- Substrate rotation
- Turbo pump and roughing pump
- Base vacuum 2 x 10-6 Torr
