Instrument Details
Features
- Designed to accommodate wafers up to 6″ in diameter
- Timer to control the exposure time
- Seven shelf positions, 1 inch apart
- UV Mercury Electrodeless Lamp
Ultraviolet Flood Exposure System – Inpro Technologies F300S
Facility Contact
Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email