Instrument Details
Features
- Non contact
- Topside and backside alignment
- Minimum Feature Size: 1 micron
- 375 nm and 405 nm exposure with LED lasers
- Write Speed: 9 minutes for 100 mm x 100 mm area
- Maximum Write Area: 150 mm x 150 mm
- Gray scale exposure mode with 256 intensity levels
- Conversion software for DXF, CIF, GDSII, and Gerber files for binary exposures; and BMP, and ASCII files for grayscale
