Instrument Details
Features
| Temperature range | 20°C – 300°C |
| Temperature Controller | Single set point PID |
| Atmosphere | vacuum |
| Maximum Substrate size | 400 mm |
| Resolution | ±0.5 °C |
| Max vacuum | 40 mTorr |
Vacuum Oven – YES
Facility Contact
Main Contact: Anil Dhote, PhD
Office: Cook Hall, #4087
(847) 491-5959 / email