Instrument Details
Features
The spinners and hotplates in Polyimide/SU8 hood are used for spin-coating and baking polyimide and SU8 resists on wafers as well as on small chips. There are 2 spinners and 3 hotplates in the hood. The spinners allow for the spin speed, ramp rate and time to be adjusted. One of the spinners is equipped with an automatic dispenser which is loaded with polyimide (PI).
