Osiris Unixx S 20D is an automated dry-in dry-out spin-developer station, which can be used to develop both positive and negative photoresists including SU8.
Instrument Details
Features
- Touch Screen Interface
- Up to 6 process chemicals
- Maximum substrate size: 8”
- Minimum substrate size: none
- Encoded spin motor for precise positioning and speed control
- Available Chucks: 4” and 5” mask plates, 3” and 4” wafers, and small piece
NUcore RESERVATION
Facility Contact
Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email
Location
Technological Institute FG70
