Instrument Details
Features
- Front side optical alignment
- 4″ system with 4″dia., 3″ dia., and 5mm x 5mm chucks, and 5″x5″, 4″x4″, and 2″x2″ masks holders available
Mask Aligner – Suss MJB4
Facility Contact
Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email