Instrument Details
Features
- Three acid hoods – general purpose acid, no HF, and multiple wafer processing hood
- Nitrogen blow guns and DI water spray guns on each side
- Spin dryer
- DI water goose neck faucet and sink
- Cup sinks for acid waste
Acid Hoods
Facility Contact
Main Contact: Shaoning Lu, PhD
Office: Tech #FG71
(847) 491-3853 / email