Coat/Bake/Develop Station

Instrument Details

Features

The system includes a number of unique features including:

• Spin-coat e-beam resist
• Puddle develop
• Hotplate bake

NUcore RESERVATION

Facility Contact

Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email

Alternate Contact: Ying Jia, PhD
(847) 467-2142 / email

Location

Technological Institute FG70