Skip to main content

SCS Labcoter2 Parylene Deposition System

Instrument Details

Features

  • Two systems: I and II
  • Automatic Operation/PLC Control
  • Programmable Digital Discrete Temperature Controller for Heated Zones
  • Cold Trap Base
  • Direct Drive Vacuum Pump – 6.9 CFM
  • Heated Load Door
  • Fixture Rotation
  • Mechanical Chiller

SCS Labcoter2 Parylene Deposition System  photo

NUcore RESERVATION

Facility Contact

Main Contact: Ying Jia, PhD
(847) 467-2142 / email


Location

Technological Institute FG70