Instrument Details
Features
- Automatic operation: Auto pump, auto deposition and auto vent
- Single and multilayer deposition via Inficon SQC310 controller
- Accommodates substrates up to 6” in diameter
- Substrate heating up to 200° C.
- Substrate rotation
- Water cooled substrate holder
- Adjustable source-substrate distance (17”-20”)
- Six pocket Temescal e-beam source (15 cc pockets)
- 6 kW FerroTech Power Supply
- Cryo pump and dry roughing pump
- Base vacuum 2 x 10-7 Torr or better
